The SMIC series has shown its worth over and over again as a dimension measurement device in the increasingly large and detailed LCD mass production line. There is a demand for further precision for the photomasks which is used as a original form in its exposure process. The UMIC series is super precise measurement devices that aim to be the standard in dimension control of such photomasks.
UMIC-800EX / 1300EX
The UMIC series was created aiming for an absolutely plane coordinate system and it achieves that from every perspective including XY axis motion accuracy, Z axis attitude accuracy, environment and correction and so on. We decide on specifications such as effective measurement range and desired accuracy based on detailed and thorough meetings with customers.
| Model | Measurement Range (X,Y) |
|---|---|
| UMIC-800EX | 800×800mm |
| UMIC-1300EX | 1300×1500mm |
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- Photomasks for LCDs
