The SMIC Series - absolute reliability in accuracy, a long history of success as LCD total pitch measuring devices. Iｔs photo mask, and precision measuring including Organic EL and MEMS demonstrate its capabilities.
SMIC machines are trusted by our customers, making the most of all technologies to make high-precision measurements possible through high precision XY stages thanks to its precise laser interference measurement system and ceramic air slider and granite surface plate, a flat glass table, and highly effective thermal cleaning chamber.
SMIC-300Ⅲ
The smallest model in the series compressing the fundamental features of SMIC in a compact body. This series has an incredible hardware structure and has a wide range of uses in measurements including MEMS precision photo mask from the TAB/COF IC fiber-optic connector.
| Model | Measurement Range (X,Y) | X,Y Repeatability |
|---|---|---|
| SMIC-300Ⅲ | 300×300mm | 3σ≦0.15μm |
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- Fiber Optic Connectors
- TABs/COFs
- MEMS photo masks
SMIC-800ⅢS / 800Ⅲ
The best model in the SMIC series. A wide range of uses from LCD color filter measurement to LCD, OLED for smartphones and even photo mask measurements used mostly in IC packages. SMIC is the brand for precision coordinate measurement since the release of the first model in 1993.
| Model | Measurement Range (X,Y) |
|---|---|
| SMIC-800ⅢS | 800×800mm |
| SMIC-800Ⅲ | 800×960mm |
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- 4.5 generation LCD panels
- OLED Panels
- OLED Metal masks
- Photo mask for IC packages
SMIC-SV1100 / SV1300
SMIC-SV1100 was created from a model change in SMIC-1100Ⅲ, boasting a high share a 5-generation LCD panel measurement. Adapting the gantry dual drive mechanism which has used in large model, compact design and increasing the speed of XY axis drive were achieved. The SMIC-SV1300, also created from a model change from the SMIC-1300Ⅲ is has a 5.5-generation LTPS panel, the main trend in large LTPS.
| Model | Measurement Range (X,Y) |
|---|---|
| SMIC-SV1100 | 1100×1300mm |
| SMIC-SV1300 | 1300×1500mm |
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- 5-5.5 generation LCD panels
SMIC-SV1500 / SV2000 / SV2200
The largest models in the SMIC series from generation 6 to 8.5. An unshakeable capability in precision despite its large size. Measurements with a high-resolution, high precision large LCD panel that fulfills its potential - a unique device.
| Model | Measurement Range (X,Y) |
|---|---|
| SMIC-1500Ⅲ | 1500×1850mm |
| SMIC-2000Ⅲ | 1950×2250mm |
| SMIC-2200Ⅲ | 2200×2500mm |
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- Generation 6-8.5 LCD panels
- High precision XY stage drive
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The perfect non-contact XY stage drive with its low heat-generating linear motor and high hardness ceramic air-slider promises to give high precision results over usage.
- Fiber-type laser interferometer
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Our in-house created fiber-type laser interferometer. The laser head, a heat source, can be removed from the main body through the fiber transmission, and we are always improving the reliability in our length measurements. The laser wave length is measured and tested with our wave length correction equipment and its quality is guaranteed.
- Gantry dual drive(SV1100 and over)
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In the large models with their gantry drive, the linear motor and laser interferometry are arranged at right and left sides of the gantry, and they automatically correct the yawing error when driving. Also, Gantry dual drive achieve high-speed drive at 200mm/sec at 2.5nm step as well as guaranteeing straightness in the hard and light ceramic gantry arm.
- High flatness glass table
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Our high flatness double-layered glass tables, with grinded glass maintain a high level of flatness in grain as well as suppress the postural change for the measuring objects and improve accuracy in measurements repeatability.
- Efficient thermal clean chambers
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The temperature control, equaled at ±0.1℃ in measuring table surface temperature distribution, and at ±0.05℃ in the nozzle, creates a highly precise measurement environment for flat coordinates. The cleanliness of the chamber is maintained below class 100 through the high quality filter.
