MEMS(Micro Electro Mechanical Systems) are ultra-small electrical and mechanical components. In Japan, they’re also called “micro machines”. This technology can be applied to gyroscopes, accelerometers to sense the posture of the object, and micro-actuators to move things. The precision photo masks used to manufacture these devices are measured with Sinto S-Precision’s products.
Measurement MEMS Photomasks
With MEMS, mechanical components such as miniscule gears and electrical devices such as gyroscopic sensors and accelerometers are made by creating microscopic structures on a glass or silicon board using semiconductor manufacturing technology. Measurements are performed on precision photomasks used to form patterns with photolithography technology.
Positions and line widths of the pattern on the photomask are measured. To form microscopic patterns, photomasks include patterns with widths under 1μm. This measurement is made possible by high-resolution microscopes and image processing technology.
